Akanishi, Yuya: search on Z-Library

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1

Controlled cobalt recess for advanced interconnect metallization

Pacco, Antoine, Akanishi, Yuya, Le, Quoc Toan, Kesters, Els, Murdoch, Gayle, Holsteyns, Frank

Journal:

Microelectronic Engineering

Year:

2019

Language:

english

File:

PDF, 1.35 MB

english, 2019

2

Study on La 2 O 3 Wet Clean by pH Controlled Functional Water

Ogawa, Yuichi, Hideaki, Iino, Takeo, Fukui, Oniki, Yusuke, Akanishi, Yuya, Altamirano-Sánchez, Efraín, Holsteyns, Frank

Journal:

ECS Transactions

Year:

2019

Language:

english

File:

PDF, 582 KB

english, 2019

3

Study of Copper Surface Preparation by Sequential Atomic Layer Wet Etching and Laser Annealing Treatments

Iwasaki, Akihisa, Akanishi, Yuya, Mazzamuto, Fulvio, Kesters, Els, Le, Quoc Toan, Holsteyns, Frank

Journal:

ECS Transactions

Year:

2017

Language:

english

File:

PDF, 5.00 MB

english, 2017

4

Corrosion of Co in BEOL interconnects in dilute HF solution

Akanishi, Yuya, Kesters, Els, Le, Quoc Toan, Holsteyns, Frank

Journal:

Solid State Phenomena

Year:

2018

Language:

english

File:

PDF, 3.24 MB

english, 2018

5

Effect of Cleaning Chemistries on Cobalt: Surface Chemistries and Electrical Characterization

Le, Quoc Toan, Kesters, Els, Akanishi, Yuya, van der Veen, Marleen H., Mizutani, Atsushi, Holsteyns, Frank

Journal:

Solid State Phenomena

Year:

2018

Language:

english

File:

PDF, 1.18 MB

english, 2018

6

Optimization of Post Etch Cobalt Compatible Clean by pH and Oxidizer

Iino, Hideaki, Ogawa, Yuichi, Masaoka, Toru, Le, Quoc Toan, Kesters, Els, Rip, Jens, Oniki, Yusuke, Akanishi, Yuya, Iwasaki, Akihisa, Holsteyns, Frank

Journal:

Solid State Phenomena

Year:

2018

Language:

english

File:

PDF, 1.00 MB

english, 2018

7

Study on La 2 O 3 Wet Clean by pH Controlled Functional Water

Ogawa, Yuichi, Hideaki, Iino, Takeo, Fukui, Oniki, Yusuke, Akanishi, Yuya, Altamirano-Sánchez, Efraín, Holsteyns, Frank

Journal:

ECS Transactions

Year:

2019

File:

PDF, 582 KB

2019

8

Wet Metal Recess Process for Enabling Scaling Boosters

Akanishi, Yuya, Kesters, Els, Le, Quoc Toan, Pacco, Antoine, Holsteyns, Frank

Journal:

ECS Transactions

Year:

2019

Language:

english

File:

PDF, 610 KB

english, 2019

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